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Sensors and Actuators, A: Physical

Volumn 95, Issue 2-3, 2002, Pages 239-249

Decoupled microgyros and the design principle DAVED

(10) Geiger, W a Butt, W U a Gaisser A a Frech, J a Braxmaier, M a Link, T a Kohne, A a Nommensen, P a Sandmaier, H a,b Lang, W a

a Hahn Schickard Gesellschaft (Germany)

b UNIVERSITY OF STUTTGART (Germany)

Author keywords

Angular rate sensor; Angular velocity; Gyroscope; Microgyro

Indexed keywords

GYROSCOPES; MICROMACHINING; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY;

ANGULAR RATE SENSOR; ANGULAR VELOCITY; DECOUPLED ANGULAR VELOCITY DETECTOR; MICROGYROS;

MICROSENSORS;

EID: 0036141726 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(01)00732-4 Document Type: Article

Times cited : (103)

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