Ball semiconductor technology and its application to MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 11-16

  Takeda, Nobuo ^a  

^a Ball Semiconductor Ltd

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTROSTATICS; INTEGRATED CIRCUIT LAYOUT; LITHOGRAPHY; SINGLE CRYSTALS; VLSI CIRCUITS;

BALL SEMICONDUCTOR TECHNOLOGIES; THREE-AXIS ACCELEROMETERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692648     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)