Analysis and design of a capacitive accelerometer based on a electrostatically levitated micro-disk

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4558, Issue , 2001, Pages 277-286

  Houlihan, Ruth ^a   Kukharenka, Alena ^a   Gindila, Mircea ^a   Kraft, Michael ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Capacitance sensing; Electrostatic forces and moments; Electrostatic levitation

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); DISKS (MACHINE COMPONENTS); ELECTRODES; ELECTROPLATED PRODUCTS; ELECTROSTATICS; FEEDBACK; FINITE ELEMENT METHOD; MODULATORS;

ELECTROSTATIC LEVITATION; PASSIVE FEEDBACKS;

ACCELEROMETERS;

EID: 0035765713     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.443012     Document Type: Conference Paper

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