Micromachined vibrating rate gyroscope with independent beams for the drive and detection modes

Sensors and Actuators, A: Physical

Volumn 80, Issue 2, 2000, Pages 170-178

  Mochida, Yoichi ^a   Tamura, Masaya ^a   Ohwada, Kuniki ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GYROSCOPES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

ELECTROSTATIC FREQUENCY TUNING; VIBRATING RATE GYROSCOPES;

MICROSENSORS;

EID: 0033888240     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00263-0     Document Type: Article

References (13)

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