MEMS inertial sensor toward higher accuracy & multi-axis sensing

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 939-942

  Nakamura, Shigeru ^a  

^a Tokimec Inc   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; FRICTION; GYROSCOPES; MICROELECTROMECHANICAL DEVICES; POSITION CONTROL; ROTORS; SENSITIVITY ANALYSIS;

INERTIAL SENSORS; MECHANICAL FRICTION; MULTI-AXIS SENSING; ROTATIONAL GYROSCOPES;

SENSORS;

EID: 33847317981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597855     Document Type: Conference Paper

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