Optical properties, structural parameters, and bonding of highly textured rocksalt tantalum nitride films

Journal of Applied Physics

Volumn 104, Issue 12, 2008, Pages

  Matenoglou, G M ^a   Koutsokeras, L E ^a   Lekka, Ch E ^a   Abadias, G ^b   Camelio, S ^b   Evangelakis, G A ^a   Kosmidis, C ^a   Patsalas, P ^a  

^a UNIVERSITY OF IOANNINA   (Greece)

^b UMR 6630   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; NITRIDES; OPTICAL PROPERTIES; PULSED LASER APPLICATIONS; PULSED LASER DEPOSITION; SPECTROSCOPIC ELLIPSOMETRY; TANNING; TANTALUM; TRANSITION METALS;

AB INITIO CALCULATIONS; CRYSTAL FIELDS; ELECTRON CONDUCTIVITIES; INTERBAND TRANSITIONS; INTRABAND ABSORPTIONS; LATTICE PARAMETERS; LOCAL SPIN DENSITY APPROXIMATIONS; MODEL SYSTEMS; OPTICAL ABSORPTIONS; PLASMA ENERGIES; PULSED LASERS; ROCK SALTS; SI(100); STRUCTURAL PARAMETERS; STRUCTURE CALCULATIONS; TANTALUM NITRIDES; TANTALUM-NITRIDE FILMS; TRIAXIAL STRESSES;

TANTALUM COMPOUNDS;

EID: 58149263422     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3043882     Document Type: Article

References (51)

1. A. E. Kaloyeros and E. Eisenbraun, Annu. Rev. Mater. Sci. 0084-6600 10.1146/annurev.matsci.30.1.363 30, 363 (2000).
2. Y. -S. Wang, W. -H. Lee, Y. -L. Wang, C. -C. Hung, and S. -C. Chang, J. Phys. Chem. Solids 0022-3697 10.1016/j.jpcs.2007.07.048 69, 601 (2008).
3. J. P. Manaud, A. Poulon, S. Gomez, and Y. L. Petitcorps, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2007.05.024 202, 222 (2007).
4. D. Adams, G. F. Malgas, N. D. Theodore, R. Gregory, H. C. Kim, E. Misra, T. L. Alford, and J. W. Mayer, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1787521 22, 2345 (2004).
5. S. M. Aouadi, P. K. Shreeman, and M. Williams, J. Appl. Phys. 0021-8979 10.1063/1.1784621 96, 3949 (2004).
6. S. M. Kang, S. G. Yoon, S. J. Suh, and D. H. Yoon, Thin Solid Films 0040-6090 10.1016/j.tsf.2007.08.027 516, 3568 (2008).
7. M. L. Lovejoy, G. A. Patrizi, D. J. Rieger, and J. C. Barbour, Thin Solid Films 0040-6090 290-291, 513 (1996).
8. N. D. Cuong, D. -J. Kim, B. -D. Kang, and S. -G. Yoon, Mater. Sci. Eng., B 0921-5107 10.1016/j.mseb.2006.08.057 135, 162 (2006).
9. C. S. Kang, H. -J. Cho, Y. H. Kim, R. Choi, C. Y. Kang, A. Shahriar, C. H. Choi, and J. C. Lee, Proc.-Electrochem. Soc. 22, 215 (2003).
10. C. -S. Shin, D. Gall, Y. -W. Kim, P. Desjardins, I. Petrov, J. E. Greene, M. Oden, and L. Hultman, J. Appl. Phys. 0021-8979 10.1063/1.1391214 90, 2879 (2001).
11. C. -S. Shin, Y. -W. Kim, N. Hellgren, D. Gall, I. Petrov, and J. E. Greene, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1513639 20, 2007 (2002).
12. C. -S. Shin, D. Gall, Y. -W. Kim, N. Hellgren, I. Petrov, and J. Greene, J. Appl. Phys. 0021-8979 10.1063/1.1510558 92, 5084 (2002).
13. S. M. Aouadi, J. Appl. Phys. 0021-8979 10.1063/1.2178394 99, 053507 (2006).
14. S. M. Aouadi, A. Bohnhoff, T. Amriou, M. Williams, J. N. Hilfiker, N. Singh, and J. A. Woollam, J. Phys.: Condens. Matter 0953-8984 10.1088/0953-8984/18/32/S01 18, S1691 (2006).
15. L. E. Koutsokeras, G. Abadias, Ch. E. Lekka, G. M. Matenoglou, D. F. Anagnostopoulos, G. A. Evangelakis, and P. Patsalas, Appl. Phys. Lett. 0003-6951 10.1063/1.2955838 93, 011904 (2008).
16. H. Wang, A. Tiwari, A. Kvit, X. Zhang, and J. Narayan, Appl. Phys. Lett. 0003-6951 10.1063/1.1466522 80, 2323 (2002).
17. M. Nordin, M. Larsson, T. Joelsson, J. Birch, and L. Hultman, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1308594 18, 2884 (2000).
18. C. Stampfl and A. J. Freeman, Phys. Rev. B 0163-1829 10.1103/PhysRevB.71. 024111 71, 024111 (2005).
19. C. Stampfl, W. Mannstadt, R. Asahi, and A. J. Freeman, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.155106 63, 155106 (2001).
20. JCPDS Powder Diffraction File No. 49-1283 (δ-TaN); JCPDS Powder Diffraction File No. 39-1485 (ε-TaN).
21. Y. Y. Wu, A. Kohn, and M. Eizenberg, J. Appl. Phys. 0021-8979 10.1063/1.1711176 95, 6167 (2004).
22. J. Mistrik, K. Takahashi, R. Antos, M. Aoyama, T. Yamaguchi, Y. Anma, Y. Fukuda, and G. V. Riessen, Thin Solid Films 0040-6090 455-456, 473 (2004).
23. S. M. Aouadi and M. Debessai, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1778410 22, 1975 (2004).
24. S. M. Rossnagel, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1520556 20, 2328 (2002).
25. Structure Reports, edited by, W. B. Pearson, (Oosthoek, Scheltema, and Holkema, Utrecht, 1969), Vol. 35A, p. 121.
26. L. Yu, C. Stampfl, D. Marshall, T. Eshrich, V. Narayanan, J. M. Rowell, N. Newman, and A. J. Freeman, Phys. Rev. B 0163-1829 10.1103/PhysRevB.65.245110 65, 245110 (2002).
27. S. Noda, K. Tepsanongsuk, Y. Tsuji, Y. Kajikawa, Y. Ogawa, and H. Komiyama, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1647593 22, 332 (2004).
28. O. van der Straten, Y. Zhu, K. Dunn, E. T. Eisenbraun, and A. E. Kaloyeros, J. Mater. Res. 0884-2914 10.1557/jmr.2004.19.2.447 19, 447 (2004).
29. D. Schmidt, S. Strehle, M. Albert, W. Hentsch, and J. W. Bartha, Microelectron. Eng. 0167-9317 85, 527 (2008).
30. N. -J. Bae, K. -I. Na, H. -I. Cho, K. -Y. Park, S. -E. Boo, J. -H. Bae, and J. -H. Lee, Jpn. J. Appl. Phys., Part 1 0021-4922 10.1143/JJAP.45.9072 45, 9072 (2006).
31. D. -K. Kim, B. -H. Kim, H. -G. Woo, D. -H. Kim, and H. K. Shin, J. Nanosci. Nanotechnol. 1533-4880 10.1166/jnn.2006.018 6, 3392 (2006).
32. G. M. Matenoglou, G. A. Evangelakis, C. Kosmidis, and P. Patsalas, Rev. Adv. Mater. Sci. 1606-5131 15, 38 (2007).
33. G. Abadias, Y. Y. Tse, Ph. Guerin, and V. Pelosin, J. Appl. Phys. 0021-8979 10.1063/1.2197287 99, 113519 (2006).
34. P. Blaha, K. Schwarz, G. K. H. Madsen, D. Kuasnicka, and J. Luitz, WIEN2K, Augmented Plane Wave Local Orbitals Program for Calculating Crystal Properties, Vienna University of Technology, Vienna, Austria, 2001.
35. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.77.3865 77, 3865 (1996).
36. J. P. Perdew and Y. Wang, Phys. Rev. B 0163-1829 10.1103/PhysRevB.45. 13244 45, 13244 (1992).
37. L. E. Davis, N. C. McDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, Handbook of Auger Electron Spectroscopy (Physical Electronic Industries Inc, Minnesota, 1978).
38. B. -H. Huang, J. Phys. D 0022-3727 10.1088/0022-3727/34/21/304 34, 3121 (2001).
39. M. Sahnoun, C. Daul, M. Driz, J. C. Parlebas, and C. Demangeat, Comput. Mater. Sci. 0927-0256 10.1016/j.commatsci.2004.12.010 33, 175 (2005).
40. D. A. Papaconstantopoulos, W. E. Pickett, B. M. Klein, and L. L. Boyer, Phys. Rev. B 0163-1829 10.1103/PhysRevB.31.752 31, 752 (1985).
41. K. Kobayashi, Surf. Sci. 0039-6028 10.1016/S0039-6028(01)01280-8 493, 665 (2001).
42. G. Abadias, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2007.08.029 202, 2223 (2008).
43. G. Abadias and Y. Y. Tse, J. Appl. Phys. 0021-8979 10.1063/1.1646444 95, 2414 (2004).
44. G. Cornella, S. -H. Lee, W. D. Nix, and J. C. Bravman, Appl. Phys. Lett. 0003-6951 10.1063/1.120225 71, 2949 (1997).
45. J. D. Kamminga, Th. H. de Keijser, R. Delhez, and E. J. Mittemeijer, J. Appl. Phys. 0021-8979 10.1063/1.1319973 88, 6332 (2000).
46. L. G. Parratt, Phys. Rev. 0031-899X 10.1103/PhysRev.95.359 95 359 (1954); L. G. Parratt and C. F. Hempstead, Phys. Rev. 94, 1593 (1954).
47. P. Patsalas and S. Logothetidis, J. Appl. Phys. 0021-8979 10.1063/1.1403677 90, 4725 (2001); P. Patsalas and S. Logothetidis, J. Appl. Phys. 0021-8979 10.1063/1.1531812 93, 989 (2003); P. Patsalas and S. Logothetidis, J. Appl. Phys. 0021-8979 10.1063/1.1609645 94, 5438 (2003).
48. F. Wooten, Optical Properties of Solids (Academic, New York, 1972).
49. R. L. Carter, Molecular Symmetry and Group Theory (Wiley, New York, 1998).
50. D. E. Aspnes, Thin Solid Films 0040-6090 10.1016/0040-6090(82)90590-9 89, 249 (1982).
51. U. Kreibig, J. Phys. F: Met. Phys. 0305-4608 10.1088/0305-4608/4/7/007 4, 999 (1974).