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Volumn 92, Issue 9, 2002, Pages 5084-5093

Development of preferred orientation in polycrystalline NaCl-structure δ-TaN layers grown by reactive magnetron sputtering: Role of low-energy ion surface interactions

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATIVE CHEMISORPTION; FLUX RATIO; ION ENERGIES; ION SURFACE INTERACTIONS; LOW ENERGIES; LOW-ENERGY ION IRRADIATION; MAGNETRON SPUTTER DEPOSITION; OVER-STOICHIOMETRIC; PARALLEL SETS; POLYCRYSTALLINE; PREFERRED ORIENTATIONS; REACTIVE MAGNETRON SPUTTERING; TEXTURE EVOLUTIONS;

EID: 18744364749     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1510558     Document Type: Article
Times cited : (88)

References (42)
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    • edited by T. B. Massalski (ASM International, Metals Park, OH)
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    • The Poisson ratio ν for TaN is not known. However, ν values for related cubic transition-metal nitrides vary only from 0.211 for TiN [, and, ] to 0.29 for CrN
    • The Poisson ratio ν for TaN is not known. However, ν values for related cubic transition-metal nitrides vary only from 0.211 for TiN [ J. O. Kim, J. D. Achenbach, P. B. Mirkarimi, M. Shinn, and S. A. Barnett, J. Appl. Phys. 72, 1805 (1992)] to 0.29 for CrN
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    • Sputter deposition typically results in a cos(θ)sin(θ) distribution, with θ being the polar angle, of the incoming atom flux. The highest flux, therefore, is at an azimuthal angle of 45°, as shown in Ref. 39
    • Sputter deposition typically results in a cos(θ)sin(θ) distribution, with θ being the polar angle, of the incoming atom flux. The highest flux, therefore, is at an azimuthal angle of 45°, as shown in Ref. 39.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.