Thin-film tantalum-nitride resistor technology for phosphide-based optoelectronics

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 513-517

  Lovejoy, M L ^a   Patrizi, G A ^a   Rieger, D J ^a   Barbour, J C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Electrical properties; Integrated circuit technology; Tantalum nitride; Thin film resistors

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; OHMIC CONTACTS; OPTOELECTRONIC DEVICES; RESISTORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; SPUTTER DEPOSITION; TANTALUM COMPOUNDS; THIN FILMS;

ELASTIC RECOIL DETECTION; SEEBECK RATIO; TANTALUM NITRIDE;

SEMICONDUCTING FILMS;

EID: 0030393726     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(06)08966-8     Document Type: Article

References (6)

1. W.E. Stanchina, J.F. Jensen, R.H. Walden, M. Hafizi, H.-C. Sun, T. Liu, G. Raghaven, K.E. Elliott, M. Kardos, A.E. Schmitz, Y.K. Brown, M.E. Montes and M. Yung, An InP-based HBT Fab for high-speed digital, analog, mixed-signal, and optoelectronics ICs, Technical Digest, GaAs IC Symposium, San Diego, CA, 1995, pp. 31.
2. W.H. Orr, D.O. Melroy, R.J. Moore, F.P. Pelletier, W.J. Pandergast and W.H. Yocum, Integrated tantalum film RC circuits, Proc. 20th Electron. Commun. Conf., Washington, DC, 1970, pp. 602.
3. G.A. Bulger, L.D. Heck, B.A. Unger and L.D. Shepherd, The STIC technology - a monolithic approach for combining tantalum and silicon technologies, IEEE Trans. Components, Hybrids, Manufact. Technol. (USA), V. CHMT-4 (1981) 396.
4. W. Worobey and J. Rutkiewicz, Tantalum thin-film RC circuit technology for a universal active filter, IEEE Trans. Parts, Hybrids Packaging (USA), V.PHP-12 (1976).
5. M.L. Trudel, Determination of the relative nitrogen doping level of tantalum nitride resistor film by means of the Seebeck effect, IEEE Trans. Parts, Hybrids, Packaging (USA), V.PHP-8 (1972) 16.
6. M.L. Lovejoy, G.A. Patrizi, P.E. Enquist, B.H. Rose J.D.B. Slater, R.J. Shul, R.F. Carson D.C. Craft, D.J. Reiger and J.A. Hutchby, Low-power, high-speed In GaAs/InP photoreceivers for highly optical data links, Technical Digest, GaAs IC Symposium, San Diego, CA, 1995, pp. 181.