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Volumn 34, Issue 21, 2001, Pages 3121-3129
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Sputtered lead scandium tantalate thin films: Crystallization behaviour during post-deposition annealing
a b b b a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTALLIZATION;
DIFFUSION;
ENERGY DISPERSIVE SPECTROSCOPY;
FERROELECTRICITY;
MAGNETRON SPUTTERING;
PYROELECTRICITY;
RAPID THERMAL ANNEALING;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING LEAD COMPOUNDS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
FURNACE ANNEALING;
LEAD SCANDIUM TANTALATE THIN FILMS;
PYROELECTRIC COEFFICIENTS;
SEMICONDUCTING FILMS;
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EID: 0035824101
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/34/21/304 Document Type: Article |
Times cited : (14)
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References (29)
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