Vacuum ultra-violet spectroscopic ellipsometry study of single-and multi-phase nitride protective films

Journal of Physics Condensed Matter

Volumn 18, Issue 32, 2006, Pages

  Aouadi, S M ^a   Bohnhoff, A ^a   Amriou, T ^b   Williams, M ^c   Hilfiker, J N ^d   Singh, N ^d   Woollam, J A ^d  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

^b UNIVERSITÉ D'ARTOIS   (France)

^c University of Illinois at Urbana Champaign   (United States)

^d J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC EXCITATION; ELECTRONIC PROPERTIES; ELECTRONIC STRUCTURE; ELLIPSOMETRY; MAGNETRON SPUTTERING; MICROPOROSITY; NITRIDES; OPTICAL PROPERTIES; PHASE TRANSITIONS; PROTECTIVE COATINGS;

DENSITY FUNCTIONAL THEORY (DFT); INTERBAND TRANSITION; SINGLE-AND MULTI-PHASE NITRIDE PROTECTIVE FILMS; VACUUM ULTRAVIOLET SPECTROSCOPIC ELLIPSOMETRY (VUV-SE);

TANTALUM COMPOUNDS;

EID: 33746745500     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/18/32/S01     Document Type: Article

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