Structural and mechanical properties of TaZrN films: Experimental and ab initio studies

Journal of Applied Physics

Volumn 99, Issue 5, 2006, Pages

  Aouadi, S M ^a  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY FUNCTIONAL THEORY (DFT); ELASTIC CONSTANTS; NANOINDENTATION; RUTHERFORD BACKSCATTERING (RBS);

APPROXIMATION THEORY; BACKSCATTERING; GRADIENT METHODS; PROBABILITY DENSITY FUNCTION; TANTALUM ALLOYS; X RAY DIFFRACTION;

THIN FILMS;

EID: 33645228352     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2178394     Document Type: Article

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