Optical properties of tantalum nitride films fabricated using reactive unbalanced magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 5, 2004, Pages 1975-1979

  Aouadi, S M ^a   Debessai, M ^a  

^a SOUTHERN ILLINOIS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS SUBSTRATES; HISTOCOMPATIBILITY; OPTICAL EMISSION SPECTROMETRY; SURFACE MIGRATION;

COATINGS; COMPOSITION; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; GRAIN SIZE AND SHAPE; ION IMPLANTATION; MAGNETRON SPUTTERING; MECHANICAL ALLOYING; METALLIC FILMS; NITROGEN; SILICON; SUBSTRATES;

TANTALUM COMPOUNDS;

EID: 8344223691     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1778410     Document Type: Article

References (26)

1. W. Ensinger, M. Kiuchi, and M. Satou, J. Appl. Phys. 77, 6630 (1995).
2. Y. M. Lu, R. J. Weng, W. S. Hwang, and Y. S. Yang, Thin Solid Films 398-399, 356 (2001).
3. Y. X. Leng et al., Thin Solid Films 398-399, 471 (2001).
4. A. Arranz and C. Palacio, Surf. Interface Anal. 29, 653 (2000).
5. W.-F. Wu, K.-L. Ou, C.-P. Chou, and C.-C. Wu, J. Electrochem. Soc. 150, G83 (2003).
6. H. B. Nie, S. X. Xu, S. J. Wang, L. P. You, Z. Yang, C. K. Ong, J. Li, and T.Y.F. Liew, Appl. Phys. A: Mater. Sci. Process. A73, 229 (2001).
7. M. Stavrev, C. Wenzel, A. Moller, and K. Drescher, Appl. Surf. Sci. 91, 257 (1995).
8. A. Arranz and C. Palacio, Vacuum 45, 1091 (1994).
9. K. Eda, T. Miwa, Y. Taguchi, and T. Uwano, IEEE Trans. Microwave Theory Tech. 38, 1949 (1990).
10. M. L. Lovejoy, G. A. Patrizi, D. J. Rieger, and J. C. Barbour, Thin Solid Films 290/291, 513 (1996).
11. K. Baba, R. Hatada, K. Udoh, and K. Yasuda, Nucl. Instrum. Methods Phys. Res. B 127/128, 841 (1997).
12. Q. Y. Zhang, X. X. Mei, D. Z. Yang, F. X. Chen, T. C. Ma, Y. M. Wang, and F. N. Teng, Nucl. Instrum. Methods Phys. Res. B 127/128, 664 (1997).
13. M. H. Tsai, S. C. Sun, H. T. Chiu, C. E. Tsai, and S. H. Chuang, Appl. Phys. Lett. 67, 1128 (1995).
14. S. M. Aouadi, T. Z. Gorishnyy, D. M. Hornyak, and S. L. Rohde, Surf. Coat. Technol. 153, 1 (2002).
15. N. J. Ianno, B. Johs, J. Hale, C. M. Herzinger, T. Tiwald, and J. A. Woollam, Proc. SPIE 4449, 41 (2001).
16. F. Wootten, Optical Properties of Solids (Academic, New York, 1972).
17. P. Patsalas and S. Logothetidis, J. Appl. Phys. 93, 989 (2003).
18. S. M. Aouadi, D. M. Mihut, M. L. Kuruppu, S. R. Kirkpatrick, and S. L. Rohde, J. Vac. Sci. Technol. A 19, 1 (2001).
19. S. M. Aouadi, M. Debessai, and P. Filip, J. Vac. Sci. Technol. B 22, 1134 (2004).
20. S. M. Aouadi, M. Debessai, and P. Filip, Surf. Coat. Technol. (in press).
21. M. F. Cerqueira, J. A. Ferreira, and G. J. Adriaensses, Thin Solid Films 370, 128 (2000).
22. K. Frisk, J. Alloys Compd. 278, 216 (1998).
23. S. M. Rossnagel, J. Vac. Sci. Technol. B 20, 2328 (2002).
24. D. I. Jones, W. E. Spear, and P. G. Le Comber, Commun. Phys. (London) 1, 39 (1976).
25. M. Losurdo, D. Berreca, P. Capezzuto, G. Bruno, and E. Tondello, Surf. Coat. Technol. 151-152, 2 (2002).
26. E. Dobierzewska-Mozrzymas, J. Wojcik, P. Bieganski, and E. Pieciul, Vacuum 54, 289 (1999).