Control of electrical resistivity of TaN thin films by reactive sputtering for embedded passive resistors

Thin Solid Films

Volumn 516, Issue 11, 2008, Pages 3568-3571

  Kang, S M ^a   Yoon, S G ^a   Suh, S J ^a   Yoon, D H ^a,b  

^a Sungkyunkwan University   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

Reactive sputtering; Resistivity; Tantalum nitride; Thin film resistors

Indexed keywords

REACTIVE SPUTTERING; RESISTORS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

ELECTRICAL RESISTIVITY; EMBEDDED PASSIVE RESISTORS; THIN FILM RESISTORS;

TANTALUM COMPOUNDS;

EID: 40649106236     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.08.027     Document Type: Article

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