Conducting transition metal nitride thin films with tailored cell sizes: The case of δ- Tix Ta1-x N

Applied Physics Letters

Volumn 93, Issue 1, 2008, Pages

  Koutsokeras, L E ^a,b   Abadias, G ^b   Lekka, Ch E ^a   Matenoglou, G M ^a   Anagnostopoulos, D F ^a   Evangelakis, G A ^a   Patsalas, P ^a  

^a UNIVERSITY OF IOANNINA   (Greece)

^b UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CELL GROWTH; CELLS; CONDUCTIVE FILMS; ELECTRONIC PROPERTIES; LIQUID PHASE EPITAXY; METALS; MOLECULAR BEAM EPITAXY; NITRIDES; TANNING; TANTALUM; TANTALUM COMPOUNDS; TERNARY SYSTEMS; THICK FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE; TRANSITION METALS;

AB INITIO CALCULATIONS; AMERICAN INSTITUTE OF PHYSICS (AIP); AS-GROWN FILMS; CELL SIZES; NITRIDE THIN FILMS; ROCKSALT (RS) STRUCTURE; TRANSITION (JEL CLASSIFICATIONS:E52 ,E41 ,E31);

FILM GROWTH;

EID: 47249112518     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2955838     Document Type: Article

References (22)

1. C. Lee and Y.-L. Kuo, J. Met. 59, 44 (2007).
2. B.-S. Suh, S.-M. Choi, Y. Wee, J.-E. Lee, J. Lee, S. J. Lee, S.-G. Lee, and K. Suh, K., IEEE Proceeding of IITC, 2005 (unpublished), p. 138.
3. H. Wang, A. Tiwari, A. Kvit, X. Zhang, and J. Narayan, Appl. Phys. Lett. 80, 2323 (2002).
4. A. E. Kaloyeros and E. Eisenbraun, Annu. Rev. Mater. Sci. 30, 363 (2000).
5. P. Ruterana, G. Nouet, Th. Kehagias, Ph. Komninou, Th. Karakostas, M. A. di Fort-Poisson, F. Huet, and H. Morkoc, Phys. Status Solidi A 176, 767 (1999).
6. S. Gautier, Ph. Komnninou, P. Patsalas, Th. Kehagias, S. Logothetidis, C. A. Dimitriadis, and G. Nouet, Semicond. Sci. Technol. 18, 594 (2003).
7. P. Patsalas and S. Logothetidis, J. Appl. Phys. 0021-8979 10.1063/1.1403677 90, 4725 (2001); P. Patsalas and S. Logothetidis, J. Appl. Phys. 0021-8979 10.1063/1.1531812 93, 989 (2003); P. Patsalas and S. Logothetidis, J. Appl. Phys. 94, 5438 (2003).
8. C.-S. Shin, D. Gall, Y.-W. Kim, N. Hellgren, I. Petrov, and J. E. Greene, J. Appl. Phys. 92, 5084 (2002).
9. G. M. Matenoglou, G. A. Evangelakis, C. Kosmidis, and P. Patsalas, Rev. Adv. Mater. Sci. 15, 38 (2007).
10. G. Abadias, Surf. Coat. Technol. 202, 2223 (2008).
11. G. Abadias, Y. Y. Tse, Ph. Guerin, and V. Pelosin, J. Appl. Phys. 99, 113519 (2006).
12. P. Blaha, K. Schwarz, G. K. H. Madsen, D. Kuasnicka, and J. Luitz, WIEN2k, Augmented Plane Wave Local Orbitals Program for Calculating Crystal Properties (Vienna University of Technology, Vienna, Austria, 2001).
13. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. 77, 3865 (1996).
14. J. P. Perdew and Y. Wang, Phys. Rev. B 45, 13244 (1992).
15. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
16. P. Patsalas, C. Gravalidis, and S. Logothetidis, J. Appl. Phys. 96, 6234 (2004).
17. JCPDS Powder Diffraction Card Nos. 38-1420 and 49-1283.
18. O. Bourbia, S. Achour, N. Tabet, M. Parlinska, and A. Harabi, Thin Solid Films 515, 6758 (2007).
19. S. M. Aouadi, J. Appl. Phys. 99, 053507 (2006).
20. C. Stampfl, W. Mannstadt, R. Asahi, and A. J. Freeman, Phys. Rev. B 63, 155106 (2001).
21. M. Sahnoun, C. Daul, M. Driz, J. C. Parlebas, and C. Demangeat, Comput. Mater. Sci. 33, 175 (2005).
22. S. M. Aouadi and M. Debessai, J. Vac. Sci. Technol. A 22, 1975 (2004).