Epitaxial growth of metastable δ-TaN layers on MgO(001) using low-energy, high-flux ion irradiation during ultrahigh vacuum reactive magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 6, 2002, Pages 2007-2017

  Shin, C S ^a   Kim, Y W ^a   Hellgren, N ^a   Gall, D ^a   Petrov, I ^a   Greene, J E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRIC CONDUCTIVITY; HARDNESS; ION BOMBARDMENT; LATTICE CONSTANTS; MAGNESIA; MAGNETRON SPUTTERING; MICROSTRUCTURE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STACKING FAULTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

SECOND-PHASE INCLUSIONS;

EPITAXIAL GROWTH;

EID: 0036864441     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1513639     Document Type: Article

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