Deposition of complex multielemental thin films

Progress in Surface Science

Volumn 76, Issue 6-8, 2004, Pages 163-217

  Willmott, P R ^a,b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF ZURICH   (Switzerland)

Author keywords

Alloys; Carbides; Complex metal oxides; Magnetron sputtering; Materials science; Nitrides; Perovskites; Pulsed laser deposition; Surface science; Thin films

Indexed keywords

ALLOYS; CARBIDES; ELECTRON MICROSCOPY; MAGNETRON SPUTTERING; MATERIALS SCIENCE; NITRIDES; PEROVSKITE; PULSED LASER DEPOSITION;

COMPLEX METAL OXIDES; HIGH-RESOLUTION ELECTRON MICROSCOPY; SURFACE SCIENCE;

THIN FILMS;

EID: 4644302280     PISSN: 00796816     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.progsurf.2004.06.001     Document Type: Review

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