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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 6, 2001, Pages 2805-2816

Estimates of differential sputtering yields for deposition applications

(2) Stepanova, M a Dew, S K a

a UNIVERSITY OF ALBERTA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; APPROXIMATION THEORY; BINDING ENERGY; COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; ION BOMBARDMENT; MOLECULAR DYNAMICS; SURFACE ROUGHNESS;

ANISOTROPIC ENERGY DISTRIBUTIONS;

SPUTTER DEPOSITION;

EID: 0035508871 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1405515 Document Type: Article

Times cited : (68)

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