Structural characteristics of AIN films deposited by pulsed laser deposition and reactive magnetron sputtering: A comparative study

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 5, 1998, Pages 2804-2815

  Jagannadham, K ^a   Sharma, A K ^a   Wei, Q ^a   Kalyanraman, R ^a   Narayan, J ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032370406     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581425     Document Type: Review

References (24)

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