Gas-phase mechanisms in the growth of ZrC y N 1-y thin films by pulsed reactive crossed-beam laser ablation

Applied Surface Science

Volumn 197-198, Issue , 2002, Pages 304-311

  Spillmann, H ^a   Clerc, C ^a   Dobeli M ^b   Willmott, P R ^a,c  

^a UNIVERSITY OF ZURICH   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Emission spectroscopy; Laser ablation; Mass spectroscopy; Thin films

Indexed keywords

EMISSION SPECTROSCOPY; ENERGY TRANSFER; FILM GROWTH; PROBABILITY; PULSED LASER DEPOSITION; STOICHIOMETRY; THERMODYNAMIC STABILITY; ZIRCONIUM COMPOUNDS;

MASS SPECTROSCOPY;

THIN FILMS;

EID: 17544396248     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00387-2     Document Type: Conference Paper

References (19)

1. Willmott P.R., Huber J.R., Rev. Mod. Phys. 72 2000 315.
2. M. Morstein, P.R. Willmott, H. Spillmann, M. Döbeli, Appl. Phys. A (2001), in press.
3. Willmott P.R., Timm R., Huber J.R., J. Appl. Phys. 82 1997 2082.
4. Doolittle L.R., Nucl. Instr. Meth. B 15 1986 227.
5. Spillmann H., Willmott P.R., Morstein M., Uggowitzer P.J., Appl. Phys. A. 73 2001 441-450.
6. Willmott P.R., Antoni F., Appl. Phys. Lett. 73 1998 1394.
7. R. Timm, Reactive crossed-beam laser ablation, Ph.D. Thesis, University of Zurich, 1998.
8. K.L. Saenger, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994, p. 211.
9. D.B. Geohegan, in: D.B. Chrisey, G.K. Hubler (Eds.), Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994, p. 137.
10. Knudtson J.T., Green W.B., Sutton D.G., J. Appl. Phys. 61 1987 4771.
11. Chen J.-H., Wang P.-N., Guo Z., Li F.-M., Acta Physica Sinica (Overseas Edition) 8 1999 223.
12. De Giacomo A., Shakhatov V.A., De Pascale O., Spectrochimica Acta B 56 2001 753.
13. W. Demtröder, Laser Spectroscopy - Basic Concepts and Instrumentation, Springer, Berlin, 1982.
14. G. Bekefi, Principles of Laser Plasmas, Wiley, New York, 1976.
15. H.R. Griem, Plasma Spectroscopy, McGraw-Hill, New York, 1964.
16. C.R. Phipps, R.W. Dreyfus, in: A. Vertes, R. Gijbels, F. Adams (Eds.), Chemical Analysis Series: Laser Ionisation Mass Analysis, Vol. 124, Wiley, New York, 1993.
17. G.C. Bond, Heterogeneous Catalysis: Principles and Applications, 2nd Edition, Clarendon Press, Oxford, 1987.
18. K. Hauffe, S.R. Morrison, Adsorption, Walter de Gruyter, Berlin, 1974.
19. Kurahashi M., Yamamoto M., Mabuchi M., Naito S., J. Vac. Sci. Technol. A 15 1997 2548.