Ferroelectric properties of PZT thin films prepared by sputtering with stoichiometric single oxide target: Comparison between conventional and rapid thermal annealing

Journal of the European Ceramic Society

Volumn 17, Issue 14, 1997, Pages 1749-1755

  Velu, G ^a   Remiens, D ^a   Thierry, B ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; LEAD COMPOUNDS; MAGNETRON SPUTTERING; THIN FILMS; TITANIUM DIOXIDE; ZIRCONIA;

LEAD ZIRCONATE TITANATE; RAPID THERMAL ANNEALING;

FERROELECTRIC MATERIALS;

EID: 0031364161     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(97)00031-9     Document Type: Article

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