Energetic particles in PVD technology: Particle-surface interaction processes and energy-particle relationships in thin film deposition

Surface and Coatings Technology

Volumn 81, Issue 1, 1996, Pages 29-35

  Hubler, G K ^a   Sprague, J A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Film growth; Film nucleation; Ion bombardment; Physical vapor deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; CRYSTAL ORIENTATION; FILM GROWTH; FILM PREPARATION; ION BOMBARDMENT; MAGNETRON SPUTTERING; MOLECULAR DYNAMICS; MONTE CARLO METHODS; NUCLEATION; PHASE COMPOSITION;

CATHODIC ARC DEPOSITION; ENERGY PARTICLE RELATIONSHIPS; FILM NUCLEATION; ION PLATING; PARTICLE SURFACE INTERACTION; PHYSICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0030148825     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02617-7     Document Type: Article

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