RHEED analysis of interface growth modes of TiN films on Si(001) produced by crossed beam laser ablation

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 105-110

  Willmott, P R ^a   Timm, R ^a   Huber, J R ^a  

^a UNIVERSITY OF ZURICH   (Switzerland)

Author keywords

Epitaxy; Laser ablation; RHEED; TiN

Indexed keywords

EPITAXIAL GROWTH; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS;

COMPRESSIVE BIAXIAL STRESS; CROSSED BEAM LASER ABLATION;

LASER ABLATION;

EID: 0032069391     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00618-1     Document Type: Article

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