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Applied Physics A: Materials Science and Processing

Volumn 75, Issue 6, 2002, Pages 647-654

From nitride to carbide: Control of zirconium-based hard materials film growth and their characterization

(4) Morstein, M a Willmott, P R b,c Spillmann, H b Dobeli M d

a Platit AG (Switzerland)

b UNIVERSITY OF ZURICH (Switzerland)

c PAUL SCHERRER INSTITUTE (Switzerland)

d ETH ZURICH (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; FILM GROWTH; LASER ABLATION; MAGNESIA; NITROGEN; OPTICAL PROPERTIES; OPTIMAL CONTROL SYSTEMS; STOICHIOMETRY; ZIRCONIUM COMPOUNDS;

HARD MATERIAL FILMS;

THIN FILMS;

EID: 0036887354 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390201414 Document Type: Article

Times cited : (11)

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