![]() |
Volumn 75, Issue 6, 2002, Pages 647-654
|
From nitride to carbide: Control of zirconium-based hard materials film growth and their characterization
a
a
Platit AG
(Switzerland)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CARBON;
CRYSTAL STRUCTURE;
EPITAXIAL GROWTH;
FILM GROWTH;
LASER ABLATION;
MAGNESIA;
NITROGEN;
OPTICAL PROPERTIES;
OPTIMAL CONTROL SYSTEMS;
STOICHIOMETRY;
ZIRCONIUM COMPOUNDS;
HARD MATERIAL FILMS;
THIN FILMS;
|
EID: 0036887354
PISSN: 09478396
EISSN: None
Source Type: Journal
DOI: 10.1007/s003390201414 Document Type: Article |
Times cited : (11)
|
References (38)
|