Nanoscale holographic interferometry for strain measurements in electronic devices

Nature

Volumn 453, Issue 7198, 2008, Pages 1086-1089

  Hÿtch, Martin ^a   Houdellier, Florent ^a   Hüe, Florian ^a   Snoeck, Etienne ^a  

^a CEMES CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT; HOLOGRAPHY; INTERFEROMETRY; MEASUREMENT METHOD; SPATIAL RESOLUTION; STRAIN; TRANSMISSION ELECTRON MICROSCOPY;

ACCURACY; ARTICLE; ELECTRON BEAM; FILM; HOLOGRAPHY; INTERFEROMETRY; NANOANALYSIS; PRIORITY JOURNAL;

EID: 45749105563     PISSN: 00280836     EISSN: 14764687     Source Type: Journal    
DOI: 10.1038/nature07049     Document Type: Article

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