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Volumn 19, Issue 3, 2006, Pages 28-31
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Strained silicon - the key to sub-45 nm CMOS
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER MOBILITY;
GATES (TRANSISTOR);
HIGH TEMPERATURE EFFECTS;
SEMICONDUCTING SILICON COMPOUNDS;
TRANSISTORS;
CMOS SILICON TRANSISTORS;
METAL GATES;
MUGFET;
STRAINED SILICON;
CMOS INTEGRATED CIRCUITS;
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EID: 33646687546
PISSN: 09611290
EISSN: None
Source Type: Journal
DOI: 10.1016/S0961-1290(06)71590-3 Document Type: Article |
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Times cited : (49)
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References (0)
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