SCOPUS 정보 검색 플랫폼

Volumn 85, Issue 4, 2004, Pages 651-653

Strain measurements by convergent-beam electron diffraction: The importance of stress relaxation in lamella preparations

(4) Clement L a,b Pantel, R c Kwakman, L F Tz b Rouviere J L a

a CEA GRENOBLE (France)

b NXP SEMICONDUCTORS (Netherlands)

c STMICROELECTRONICS (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELECTRON MICROSCOPY; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; ION BEAMS; MICROELECTRONICS; MOSFET DEVICES; NICKEL; POLYCRYSTALLINE MATERIALS; SILICON; STRAIN MEASUREMENT; STRESS RELAXATION; SUBSTRATES; THERMAL EFFECTS;

CONVERGENT-BEAM ELECTRON DIFFRACTION (CBED) PATTERNS; LOCAL CRYSTAL ROTATIONS; MONOCRYSTALLINE SILICON SUBSTRATES;

ELECTRON DIFFRACTION;

EID: 4043091241 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1774275 Document Type: Article

Times cited : (149)

References (13)

1
- 4043078123
- to be published in the conference proceedings
- L. F. Tz. Kwakman, D. Delille, M. Mermoux, A. Crisci, and G. Lucazeau, ALTECH Paris 2003, to be published in the conference proceedings.
- ALTECH Paris 2003
- Kwakman, L.F.Tz.¹ Delille, D.² Mermoux, M.³ Crisci, A.⁴ Lucazeau, G.⁵

2
- 4043110940
- C. J. Humphreys, D. J. Eaglesham, D. M. Maher, and H. L. Fraser, Ultramicroscopy 26, 13 (1998).
- (1998) Ultramicroscopy , vol.26 , pp. 13
- Humphreys, C.J.¹ Eaglesham, D.J.² Maher, D.M.³ Fraser, H.L.⁴

3
- 0037475111
- A. Armigliato, R. Balboni, G. P. Carnevale, G. Pavia, D. Piccolo, S. Fraboni, and A. Benedetti, Appl. Phys. Lett. 82, 2172 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2172
- Armigliato, A.¹ Balboni, R.² Carnevale, G.P.³ Pavia, G.⁴ Piccolo, D.⁵ Fraboni, S.⁶ Benedetti, A.⁷

4
- 0242636927
- V. Senez, A. Armigliato, I. De Wolf, G. Carnevale, R. Baldoni, S. Frabboni, and A. Benedetti, J. Appl. Phys. 94, 5574 (2003).
- (2003) J. Appl. Phys. , vol.94 , pp. 5574
- Senez, V.¹ Armigliato, A.² De Wolf, I.³ Carnevale, G.⁴ Baldoni, R.⁵ Frabboni, S.⁶ Benedetti, A.⁷

5
- 0022028887
- M. M. J. Treacy, J. M. Gibson, and A. Howie, Philos. Mag. A 51, 389 (1985).
- (1985) Philos. Mag. A , vol.51 , pp. 389
- Treacy, M.M.J.¹ Gibson, J.M.² Howie, A.³

6
- 0034074868
- K. Tillmann, M. Lentzen, and R. Rosenfeld, Ultramicroscopy 83, 111 (2000).
- (2000) Ultramicroscopy , vol.83 , pp. 111
- Tillmann, K.¹ Lentzen, M.² Rosenfeld, R.³

7
- 0028651033
- F. Banhart, Ultramicroscopy 56, 233 (1994).
- (1994) Ultramicroscopy , vol.56 , pp. 233
- Banhart, F.¹

8
- 0028500513
- C. T. Chou, S. C. Anderson, D. J. H. Cockayne, A. Z. Sikorski, and M. R. Vaughan, Ultramicroscopy 55, 334 (1994).
- (1994) Ultramicroscopy , vol.55 , pp. 334
- Chou, C.T.¹ Anderson, S.C.² Cockayne, D.J.H.³ Sikorski, A.Z.⁴ Vaughan, M.R.⁵

9
- 0026189678
- D. D. Perovic, G. C. Weatherly, and D. C. Houghton, Philos. Mag. A 64, 1 (1991).
- (1991) Philos. Mag. A , vol.64 , pp. 1
- Perovic, D.D.¹ Weatherly, G.C.² Houghton, D.C.³

10
- 0142060692
- P. Stadelmann, Microsc. Microanal. 9, 60 (2003).
- (2003) Microsc. Microanal. , vol.9 , pp. 60
- Stadelmann, P.¹

11
- 4043072396
- SFμ, Paris, Chap. 7
- J. P. Morniroli, Large-Angle Convergent-Beam Electron Diffraction (LACBED) (SFμ, Paris, 2002), Chap. 7, p. 171.
- (2002) Large-angle Convergent-beam Electron Diffraction (LACBED) , pp. 171
- Morniroli, J.P.¹

12
- 0024684332
- C. T. Chou, L. J. Zhao, and T. Ko, Philos. Mag. A 59, 1221 (1989).
- (1989) Philos. Mag. A , vol.59 , pp. 1221
- Chou, C.T.¹ Zhao, L.J.² Ko, T.³

13
- 0036341396
- T. Okuyama, M. Nakayama, Y. Tomokiyo, and O. Van der Biest, Microsc. Microanal. 8, 11 (2002).
- (2002) Microsc. Microanal. , vol.8 , pp. 11
- Okuyama, T.¹ Nakayama, M.² Tomokiyo, Y.³ Van Der Biest, O.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.