Two-dimensional mapping of the electrostatic potential in transistors by electron holography

Physical Review Letters

Volumn 82, Issue 12, 1999, Pages 2614-2617

  Rau, W D ^a   Schwander, P ^a   Baumann, F H ^a   Hoppner W ^b   Ourmazd, A ^a  

^a IHP   (Germany)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; HOLOGRAPHY; SEMICONDUCTOR DEVICE STRUCTURES;

ELECTRON HOLOGRAPHY; ELECTROSTATIC POTENTIAL DISTRIBUTION; SUBMICRON TRANSISTORS;

TRANSISTORS;

EID: 0032620923     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.82.2614     Document Type: Article

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