Precipitates and hydrogen passivation at crystal defects in n - And p -type multicrystalline silicon

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  Geerligs, L J ^a   Komatsu, Y ^a   Rover I ^b   Wambach, K ^b   Yamaga, I ^c   Saitoh, T ^c  

^a TNO   (Netherlands)

^b Deutsche Solar AG   (Germany)

^c Dai Ichi Kiden Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; HYDROGENATION; PASSIVATION; PRECIPITATES; SILICON WAFERS; THERMAL EFFECTS;

EXTENDED CRYSTAL DEFECTS (ECD); INDUSTRIAL WAFERS; MULTICRYSTALLINE SILICON;

CRYSTAL DEFECTS;

EID: 36248930352     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2800271     Document Type: Article

References (56)

1. A. A. Istratov, T. Buonassisi, R. J. McDonald, A. R. Smith, R. Schindler, J. A. Rand, J. P. Kalejs, and E. R. Weber, J. Appl. Phys. 94, 6552 (2003).
2. D. Macdonald, A. Cuevas, A. Kinomura, Y. Nakano, and L. J. Geerligs, J. Appl. Phys. 97, 033523 (2005).
3. A. Bentzen, A. Holt, R. Kopecek, G. Stokkan, J. S. Christensen, and B. G. Svensson, J. Appl. Phys. 99, 093509 (2006).
4. S. Narayanan, S. R. Wenham, and M. A. Green, Appl. Phys. Lett. 48, 873 (1986).
5. S. M. Myers, M. Seibt, and W. Schröter, J. Appl. Phys. 88, 3795 (2000), and references therein.
6. I. Perichaud, Sol. Energy Mater. Sol. Cells 72, 315 (2002).
7. M. Seibt, A. Sattler, C. Rudolf, O. Voss, V. Kveder, and W. Schröter, Phys. Status Solidi A 203, 696 (2006).
8. C. Ballif, S. Peters, D. Borchert, C. Hässler, J. Isenberg, R. Schindler, W. Warta, G. Willeke, Proceedings of the 17th European Photovoltaic Solar Energy Conference, München, Germany, 2001, p. 1818.
9. A. Azzizi, L. J. Geerligs, and A. R. Burgers, Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1384.
10. B. Sopori, J. Electron. Mater. 31, 972 (2002).
11. O. Schultz, S. W. Glunz, S. Riepe, and G. P. Willeke, Prog. Photovoltaics 14, 711 (2006).
12. J. Härkönen, V.-P. Lempinen, T. Juvonen, and J. Kylmäluoma, Sol. Energy Mater. Sol. Cells 73, 125 (2003).
13. A. Bentzen, E. S. Marstein, R. Kopecek, A. Holt, Proceedings of the 18th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 935.
14. P. Manshanden and L. J. Geerligs, Sol. Energy Mater. Sol. Cells 90, 998 (2006).
15. C. Dub́, J. I. Hanoka, and D. B. Sandstrom, Appl. Phys. Lett. 44, 425 (1985).
16. M. Kittler, C. Ulhaq-Bouillet, and V. Higgs, J. Appl. Phys. 78, 4573 (1995).
17. R. Einhaus, F. Duerinckx, E. Van Kerschaver, J. Szlufcik, F. Durand, P. J. Ribeyron, J. C. Duby, D. Sarti, G. Goaer, G. N. Le, I. Ṕrichaud, L. Clerc, and S. Martinuzzi, Mater. Sci. Eng., B 58, 81 (1999).
18. G. Hahn and A. Schönecker, J. Phys.: Condens. Matter 16, R1615 (2004), and references therein.
19. M. Rinio, M. Kaes, G. Hahn, and D. Borchert, Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 684.
20. A. Cuevas, M. J. Kerr, C. Samundsett, F. Ferrazza, and G. Coletti, Appl. Phys. Lett. 81, 4952 (2002).
21. D. Macdonald and L. J. Geerligs, Appl. Phys. Lett. 85, 4061 (2004).
22. L. J. Geerligs, C. J. J. Tool, R. Kinderman, I. Röver, K. Wambach, R. Kopecek, T. Buck, J. Libal, R. Petres, P. Fath, P. Sánchez-Friera, J. Alonso, M. Acciarri, S. Binetti, and S. Pizzini, Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 566, and references therein.
23. S. Martinuzzi, O. Palais, and S. Ostapenko, Mater. Sci. Semicond. Process. 9, 230 (2006).
24. J. E. Cotter, J. H. Guo, P. J. Cousins, M. D. Abbott, F. W. Chen, and K. C. Fisher, IEEE Trans. Electron Devices 53, 1893 (2006).
25. M. Dhamrin, T. Saitoh, K. Kamisako, and I. Yamaga, Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 870.
26. A type of directional solidification developed by Crystal Systems, Salem, MA (USA).
27. Methodology as in A. Schönecker, J. A. Eikelboom, A. R. Burgers, P. Lölgen, C. Leguijt, and W. C. Sinke, J. Appl. Phys. 79, 1497 (1996).
28. D. Macdonald and A. Cuevas, Appl. Phys. Lett. 74, 1710 (1999).
29. W. Soppe, H. Rieffe, and A. Weeber, Prog. Photovoltaics 13, 551 (2005).
30. J. Henze, C. Schmiga, J. Schmidt, and R. Hezel, Proceedings of the 19th European Photovoltaic Solar Energy Conference, Paris, France, 2004, p. 907, and references therein.
31. S. Binetti, M. Acciarri, C. Savigni, A. Brianza, S. Pizzini, and A. Musinu, Mater. Sci. Eng., B 0921-5107 10.1016/0921-5107(95)01268-0 36, 68 (1996); A. Schönecker, L. J. Geerligs, and A. Müller, Solid State Phenom. 1012-0394 95-96, 149 (2004); M. Rossberg, M. Naumann, K. Irmscher, U. Juda, A. Lüdge, M. Ghosh, and A. Müller, Solid State Phenom. 108-109, 531 (2005).
32. S. Binetti, M. Acciarri, C. Savigni, A. Brianza, S. Pizzini, and A. Musinu, Mater. Sci. Eng., B 0921-5107 10.1016/0921-5107(95)01268-0 36, 68 (1996); A. Schönecker, L. J. Geerligs, and A. Müller, Solid State Phenom. 1012-0394 95-96, 149 (2004); M. Rossberg, M. Naumann, K. Irmscher, U. Juda, A. Lüdge, M. Ghosh, and A. Müller, Solid State Phenom. 108-109, 531 (2005).
33. S. Binetti, M. Acciarri, C. Savigni, A. Brianza, S. Pizzini, and A. Musinu, Mater. Sci. Eng., B 0921-5107 10.1016/0921-5107(95)01268-0 36, 68 (1996); A. Schönecker, L. J. Geerligs, and A. Müller, Solid State Phenom. 1012-0394 95-96, 149 (2004); M. Rossberg, M. Naumann, K. Irmscher, U. Juda, A. Lüdge, M. Ghosh, and A. Müller, Solid State Phenom. 108-109, 531 (2005).
34. T. Buonassisi, A. A. Istratovy, M. D. Pickett, M. Heuer, J. P. Kalejs, G. Hahn, M. A. Marcus, B. Lai, Z. Cai, S. M. Heald, T. F. Ciszek, R. F. Clark, D. W. Cunningham, A. M. Gabor, R. Jonczyk, S. Narayanan, E. Sauar, and E. R. Weber, Prog. Photovoltaics 14, 513 (2006).
35. D. Macdonald, H. Mäckel, and A. Cuevas, Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, Hawaii, 2006, p. 952.
36. T. Buonassisia, A. A. Istratov, S. Peters, C. Ballif, J. Isenberg, S. Riepe, W. Warta, R. Schindler, G. Willeke, Z. Cai, B. Lai, and E. R. Weber, Appl. Phys. Lett. 87, 121918 (2005).
37. V. Kveder, M. Kittler, and W. Schröter, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.115208 63, 115208 (2001); M. Seibt, V. Kveder, W. Schröter, and O. Voß, Phys. Status Solidi A 0031-8965 10.1002/pssa.200460515 202, 911 (2005); W. Schröter and H. Cerva, Solid State Phenom. 85-86, 67 (2002).
38. V. Kveder, M. Kittler, and W. Schröter, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.115208 63, 115208 (2001); M. Seibt, V. Kveder, W. Schröter, and O. Voß, Phys. Status Solidi A 0031-8965 10.1002/pssa.200460515 202, 911 (2005); W. Schröter and H. Cerva, Solid State Phenom. 85-86, 67 (2002).
39. V. Kveder, M. Kittler, and W. Schröter, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63.115208 63, 115208 (2001); M. Seibt, V. Kveder, W. Schröter, and O. Voß, Phys. Status Solidi A 0031-8965 10.1002/pssa.200460515 202, 911 (2005); W. Schröter and H. Cerva, Solid State Phenom. 85-86, 67 (2002).
40. M. Acciarri, S. Binetti, A. Le Donne, S. Marchionna, M. Vimercati, J. Libal, R. Kopecek, and K. Wambach, Prog. Photovoltaics 15, 375 (2007).
41. T. Buonassisi, A. A. Istratov, M. A. Marcus, B. Lai, Z. Cai, S. M. Heald, and E. R. Weber, Nat. Mater. 4, 676 (2005).
42. P. S. Plekhanov and T. Y. Tan, Appl. Phys. Lett. 0003-6951 10.1063/1.126778 76, 3777 (2000); T. Y. Tan and P. S. Plekhanov, Mater. Res. Soc. Symp. Proc. 669, J6.11.1 (2002).
43. P. S. Plekhanov and T. Y. Tan, Appl. Phys. Lett. 0003-6951 10.1063/1.126778 76, 3777 (2000); T. Y. Tan and P. S. Plekhanov, Mater. Res. Soc. Symp. Proc. 669, J6.11.1 (2002).
44. J. Chen, D. Yang, Z. Xi, and T. Sekiguchi, Physica B 364, 162 (2005).
45. P. Geiger, G. Kragler, G. Hahn, and P. Fath, Sol. Energy Mater. Sol. Cells 85, 559 (2005).
46. W. B. Henley and D. A. Ramappa, J. Appl. Phys. 82, 589 (1997).
47. O. F. Vyvenko, O. Krüger, and M. Kittler, Appl. Phys. Lett. 76, 697 (2000).
48. M. Kaes, G. Hahn, and A. Metz, Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 2006, p. 679.
49. T. Buonassisi, O. F. Vyvenko, A. A. Istratov, E. R. Weber, G. Hahn, D. Sontag, J. P. Rakotoniaina, O. Breitenstein, J. Isenberg, and R. Schindler, J. Appl. Phys. 95, 1556 (2004).
50. B. Sopori, Y. Zhang, and N. M. Navindra, J. Electron. Mater. 30, 1616 (2001).
51. B. Sopori, C. Wei, Z. Yi, and J. Madjdpour, J. Cryst. Growth 0022-0248 10.1016/S0022-0248(99)00708-3 210, 346 (2000); B. Sopori and W. Chen, J. Cryst. Growth 210, 375 (2000).
52. B. Sopori, C. Wei, Z. Yi, and J. Madjdpour, J. Cryst. Growth 0022-0248 10.1016/S0022-0248(99)00708-3 210, 346 (2000); B. Sopori and W. Chen, J. Cryst. Growth 210, 375 (2000).
53. L. J. Geerligs, Proceedings of the 14th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Winter Park, Colorado, (NREL, Golden, CO, 2004), p. 143; Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1044.
54. L. J. Geerligs, Proceedings of the 14th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Winter Park, Colorado, (NREL, Golden, CO, 2004), p. 143; Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan, 2003, p. 1044.
55. S. Martinuzzi, O. Palais, M. Pasquinelli, and F. Ferrazza, Eur. Phys. J.: Appl. Phys. 32, 187 (2005).
56. Properties of Metal Silicides, edited by, K. Maex, and, M. Van Rossum, (Inspec, London, 1995).