Effect of nitrogen contamination by crucible encapsulation on polycrystalline silicon material quality

Materials Science and Engineering B

Volumn 36, Issue 1-3, 1996, Pages 68-72

  Binetti, S ^a   Acciarri, M ^a   Savigni, C ^a   Brianza, A ^a   Pizzini, S ^b   Musinu, A ^b  

^a INFM   (Italy)

^b UNIVERSITY OF CAGLIARI   (Italy)

Author keywords

Nitrogen; Silicon nitride

Indexed keywords

EID: 0001707963     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(95)01268-0     Document Type: Article

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