Analysis and Design Principles of MEMS Devices

Analysis and Design Principles of MEMS Devices

Volumn , Issue , 2005, Pages

  Bao, Minhang ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85013863877     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-0-444-51616-9.X5000-0     Document Type: Book

References (104)

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