Compact model for the squeezed-film damping including the open border effects

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 76-79

  Veijola, T ^a   Ruokonen, K ^a   Tittonen, I ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Acoustic impedance; Damping in microstructures; Fringe flow; Gas damping; Reynolds equation

Indexed keywords

ACOUSTIC IMPEDANCE; BOUNDARY CONDITIONS; COMPUTER SIMULATION; FREQUENCY DOMAIN ANALYSIS; INDUCTANCE; MATHEMATICAL MODELS; MICROSTRUCTURE; REYNOLDS NUMBER; VISCOUS FLOW;

DAMPING IN MICROSTRUCTURES; FRINGE FLOW; GAS DAMPING; REYNOLD EQUATION;

DAMPING;

EID: 1242327184     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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