Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Sensors and Actuators: A. Physical

Volumn 48, Issue 3, 1995, Pages 239-248

  Veijola, Timo ^a   Kuisma, Heikki ^b   Lahdenperä, Juha ^b   Ryhänen, Tapani ^b  

^a AALTO UNIVERSITY   (Finland)

^b VAISALA OYJ   (Finland)

Author keywords

Accelerometers; Effective viscosity; Equivalent circuit models; Slip flow; Squeezed gas films

Indexed keywords

ELECTRIC INDUCTORS; EQUIVALENT CIRCUITS; FILMS; FREQUENCY DOMAIN ANALYSIS; FREQUENCY RESPONSE; MATHEMATICAL MODELS; PRESSURE EFFECTS; RESISTORS; SILICON; TIME DOMAIN ANALYSIS; VISCOSITY;

SILICON ACCELEROMETERS; SLIP FLOW; SQUEEZED GAS FILMS;

ACCELEROMETERS;

EID: 0029296703     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(95)00995-7     Document Type: Article

References (16)

1. A study of fluid squeeze-film damping
2. On isothermal squeeze films
3. A resonant pressure sensor based on a squeezed film of gas
4. A comparison of squeeze film theory with measurements on a microstructure
5. The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings
6. Analysis of ultra-thin gas film lubrication based on linearized Boltzman equation: first report — derivation of a generalized lubrication equation including thermal creep flow
7. An experimental investigation of molecular rarefraction effects in gas lubricated bearings at ultra-low clearance
8. Modified Reynolds equation for ultra-thin film gas lubrication using 1.5-order slip-flow model and considering surface accommodation coefficient
9. Piezoresistive silicon accelerometer for automotive applications
10. A low cost high performance capacitive accelerometer
11. APLAC — a new approach to circuit simulation by object-orientation
12. Accelerometer model in APLAC