Silicon mirrors and micromirror arrays for spatial laser beam modulation

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 76-82

  Kurth, Steffen ^a   Hahn, Ramon ^a   Kaufmann, Christian ^a   Kehr, Kersten ^a   Mehner, Jan ^a   Wollmann, Udo ^a   Dötzel, Wolfram ^a   Gessner, Thomas ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Micromirror arrays; Modified BESOI technology; Two directional deflection

Indexed keywords

LASER BEAMS; LIGHT MODULATION; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

SILICON MICROMIRROR ARRAYS; TWO DIRECTIONAL DEFLECTION;

MIRRORS;

EID: 0032050951     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01731-7     Document Type: Article

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