Design and simulation of miniature vibrating electric field sensors

Proceedings of IEEE Sensors

Volumn 3, Issue , 2004, Pages 1589-1592

  Gong, Chao ^a   Xia, Shanhong ^a   Deng, Kai ^a   Bai, Qiang ^a   Chen, Shaofeng ^a  

^a INSTITUTE OF ELECTRONICS   (China)

Author keywords

Electric field sensor; Finite element method; MEMS

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CHARGE; ELECTRIC CURRENTS; ELECTRIC FIELDS; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SIGNAL TO NOISE RATIO; VIBRATIONS (MECHANICAL);

ELECTRIC FIELD SENSORS (EFS); STRUCTURAL PARAMETERS; VIBRATING METHODS;

MICROSENSORS;

EID: 27944432180     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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4. Mark N. Horenstein, Patrick R. Stone, A microaperture electrostatic field mill based on MEMS technology, Journal of Electrostatics 51-52 (2001) 515-521
5. Patrick S. Riehl, Karen L. Scott, Richard S. Muller, et al, Electrostatic Charge and Field Sensors Based on Micromechanical Resonators journal of microelectromechanical systems, vol. 12, no. 5, October 2003