SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 11, 2006, Pages 2330-2335

Squeeze-film air damping of a torsion mirror at a finite tilting angle

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DAMPING; FUNCTION EVALUATION; NONLINEAR EQUATIONS; PRESSURE EFFECTS; TORQUE;

DAMPING TORQUE; REYNOLDS EQUATIONS; TILTING ANGLE;

MIRRORS;

EID: 33750592325 PISSN: 09601317 EISSN: 13616439 Source Type: Journal
DOI: 10.1088/0960-1317/16/11/012 Document Type: Article

Times cited : (43)

References (11)

1
- 0032288380
- Pull-in study of an electrostatic torsion microactuator
- Degani O, Socher E, Lipson A, Leitner T, Setter D J, Kaldor S and Nemirovsky Y 1998 Pull-in study of an electrostatic torsion microactuator J. Microelectromech. Syst. 7 373-9
- (1998) J. Microelectromech. Syst. , vol.7 , Issue.4 , pp. 373-379
- Degani, O.¹ Socher, E.² Lipson, A.³ Leitner, T.⁴ Setter, D.J.⁵ Kaldor, S.⁶ Nemirovsky, Y.⁷

2
- 0035341434
- A study of the static characteristics of a torsional micromirror
- Zhang X M, Chau F S, Quan C, Lam Y L and Liu A Q 2001 A study of the static characteristics of a torsional micromirror Sensors Actuators A 90 73-81
- (2001) Sensors Actuators , vol.90 , Issue.1-2 , pp. 73-81
- Zhang, X.M.¹ Chau, F.S.² Quan, C.³ Lam, Y.L.⁴ Liu, A.Q.⁵

3
- 85013863877
- Bao M H 2005 Analysis and Design Principles of MEMS Devices (Amsterdam: Elsevier) chapter 3
- (2005) Analysis and Design Principles of MEMS Devices
- Bao, M.H.¹

4
- 0000678878
- Isothermal squeeze films
- Langlois W E 1962 Isothermal squeeze films Q. Appl. Math. 20 131-50
- (1962) Q. Appl. Math. , vol.20 , pp. 131-150
- Langlois, W.E.¹

5
- 0016577550
- Squeeze film dampers: Amplitude effects at low squeeze numbers
- Sadd M H and Stiffler A K 1975 Squeeze film dampers: amplitude effects at low squeeze numbers Trans. ASME, J. Eng. Ind. B 57 1366-70
- (1975) Trans. ASME, J. Eng. Ind. , vol.57 , pp. 1366-1370
- Sadd, M.H.¹ Stiffler, A.K.²

6
- 0025559263
- Squeeze-film damping in solid-state accelerometer
- Starr J B 1990 Squeeze-film damping in solid-state accelerometer IEEE Workshop on Solid-State Sensors and Actuators (Hilton Head Island, SC) pp 44-7
- (1990) IEEE Workshop on Solid-State Sensors and Actuators , pp. 44-47
- Starr, J.B.¹

7
- 0011889640
- Numerical simulation of compressible squeeze-film damping
- Yang Y J and Senturia S D 1996 Numerical simulation of compressible squeeze-film damping IEEE Workshop on Solid-State Sensors and Actuators (Hilton Head Island, SC) pp 76-9
- (1996) IEEE Workshop on Solid-State Sensors and Actuators , pp. 76-79
- Yang, Y.J.¹ Senturia, S.D.²

8
- 0032163224
- Squeeze film damping effect on the dynamic response of a MEMS torsion mirror
- Pan F, Kubby J, Peeters E, Tran A and Mukherjee S 1998 Squeeze film damping effect on the dynamic response of a MEMS torsion mirror J. Micromech. Microeng. 8 200-8
- (1998) J. Micromech. Microeng. , vol.8 , Issue.3 , pp. 200-208
- Pan, F.¹ Kubby, J.² Peeters, E.³ Tran, A.⁴ Mukherjee, S.⁵

9
- 0036896681
- Modeling air-damping effect in a bulk micromachined 2D tilt mirror
- Hao Z, Clark R, Hammer J, Whitley M and Wingfield B 2002 Modeling air-damping effect in a bulk micromachined 2D tilt mirror Sensors Actuators A 102 42-8
- (2002) Sensors Actuators , vol.102 , Issue.1-2 , pp. 42-48
- Hao, Z.¹ Clark, R.² Hammer, J.³ Whitley, M.⁴ Wingfield, B.⁵

10
- 33750588224
- Gaseous slip flow in parallel plates microchannel
- Wei X, Lu D and Jiang Z 2005 Gaseous slip flow in parallel plates microchannel Micronanoelectron. Technol. (March) 129-32
- (2005) Micronanoelectron. Technol. , Issue.MARCH , pp. 129-132
- Wei, X.¹ Lu, D.² Jiang, Z.³

11
- 23944449153
- Damping of a micro-resonator torsion mirror in rarefied gas ambient
- Minikes A, Bucher I and Avivi G 2005 Damping of a micro-resonator torsion mirror in rarefied gas ambient J. Micromech. Microeng. 15 1762-9
- (2005) J. Micromech. Microeng. , vol.15 , Issue.9 , pp. 1762-1769
- Minikes, A.¹ Bucher, I.² Avivi, G.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.