Damping of a micro-resonator torsion mirror in rarefied gas ambient

Journal of Micromechanics and Microengineering

Volumn 15, Issue 9, 2005, Pages 1762-1769

  Minikes, Adi ^a   Bucher, Izhak ^a   Avivi, Gal ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PARAMETER ESTIMATION; VISCOSITY;

SQUEEZE-FILM MODEL; STRUCTURAL DAMPING; TORSION MIRRORS; VACUUM LEVELS;

MICROELECTROMECHANICAL DEVICES;

EID: 23944449153     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/9/019     Document Type: Article

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