End effects of rare gas flow in short channels and in squeezed-film dampers

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 104-107

  Veijola, Timo ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

Compact Model; End Effect; Knudsen Number; Rarefied Gas Flow; Squeezed Film Damper

Indexed keywords

APPROXIMATION THEORY; BOUNDARY CONDITIONS; CHANNEL FLOW; COMPOSITE MICROMECHANICS; DAMPING; REYNOLDS NUMBER; VISCOSITY;

COMPACT MODEL; END EFFECT; KNUDSEN NUMBER; RAREFIELD GAS FLOW; SQEEZED-FILM DAMPER;

VISCOUS FLOW;

EID: 6344255252     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. F. Sharipov and V. Seleznev, "Data on Internal Rarefied Gas Flows," J. Phys. Chem. Ref. Data, vol. 27, no. 3, pp. 657-706, 1998.
2. P. Y. Wang and E. Y. Yu, "Nearly Free-Molecular Channel Flow at Finite Pressure Ratio," The Physics of Fluids, vol. 15, no. 6, pp. 1004-1009, 1971.
3. W. Steckelmacher, "The Effect of Cross-Sectional Shape on the Molecular Flow in Long Tubes," Vacuum, vol. 28, no. 6/7, pp. 269-275, 1979.
4. W. S. Griffin, H. H. Richardson, and S. Yamanami, "A Study of Fluid Squeeze-Film Damping," Journal of Basic Engineering, Trans. ASME, pp. 451-456, June 1966.
5. T. Veijola, H. Kuisma, J. Lahdenperä, and T. Ryhänen, "Equivalent Circuit Model of the Squeezed Gas Film in a Silicon Accelerometer," Sensors and Actuators A, vol. 48, pp. 239-248, 1995.
6. S. Vemuri, G. K. Fedder, and T. Mukherjee, "Low-Order Squeeze Film Model for Simulation of MEMS Devices," MSM'2000, (San Diego), pp. 205-208, April 2000.
7. T. Veijola, K. Ruokonen, and I. Tittonen, "Compact Squeezed-Film Damping Model Including the Open Border Effects," Proceedings of MSM 2001, (Hilton Head), pp. 76-79, April 2001.
8. R. B. Darling, C. Hivick, and J. Xu, "Compact Analytical Modeling for Squeeze Film Damping with Arbitrary Venting Conditions Using a Green's Function Approach," Sensors and Actuators A, vol. 70, pp. 32-41, 1998.
9. T. Veijola, "Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels," Proceedings of MSM 2001, (Hilton Head), pp. 96-99, April 2001.