Compact models for squeeze-film damping in the slip flow regime

2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004

Volumn 2, Issue , 2004, Pages 243-246

  Sattler, Robert ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Compact model; Finite network; Mixed level modeling; Slip flow; Squeeze film damping

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; NAVIER STOKES EQUATIONS; REYNOLDS NUMBER; SOFTWARE PROTOTYPING; TRANSITION FLOW;

COMPACT MODEL; FINITE NETWORK; MIXED-LEVEL MODELING; SLIP FLOW; SQUEEZE-FILM DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344285716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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