Effect of holes and edges on the squeeze film damping of perforated micromechanical structures

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 296-301

  Kim, Eung Sam ^a   Cho, Young Ho ^a   Kim, Moon Uhn ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; PERFORATING;

PERFORATED MICROMECHANICAL STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032627176     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)