SCOPUS 정보 검색 플랫폼

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 27, Issue 3, 2006, Pages 473-477

Modified Reynolds equation for squeeze-film air damping of slotted plates in MEMS devices

(4) Sun, Yuancheng a Bao, Minhang a Yang, Heng b Huang, Yiping a

a FUDAN UNIVERSITY (China)

b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY (China)

Author keywords

MEMS; Reynolds equation; Slotted plate; Squeeze film air damping

Indexed keywords

AIR; BOUNDARY CONDITIONS; CALCULATIONS; DAMPING; DIFFERENTIAL EQUATIONS; PRESSURE DISTRIBUTION; STRUCTURE (COMPOSITION);

ANSYS; DAMPING FORCE COEFFICIENT; DAMPING PRESSURE DISTRIBUTION; EFFECTIVE CHANNEL LENGTH; END EFFECT; GEOMETRIC CHANNEL LENGTH; LATERAL DIMENSIONS; MICROELECTROMECHANICAL SYSTEM (MEMS); REYNOLDS EQUATION; SLOTTED PLATE; SQUEEZE FILM AIR DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 33745131788 PISSN: 02534177 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (5)

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