Squeeze film damping in arbitrary shaped microdevices modelled by an accurate mixed level scheme

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 92-95

  Schrag, Gabriele ^a   Voigt, Peter ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Compact modeling; Mixed level simulation; Non trivial geometries; Squeeze film damping effects

Indexed keywords

COMPACT MODELING; MIXED LEVEL SIMULATION; NON-TRIVIAL GEOMETRIES; SQUEEZE FILM DAMPING DEFECTS;

COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; FINITE ELEMENT METHOD; FLUIDICS; MICROSTRUCTURE; NAVIER STOKES EQUATIONS; PHASE SHIFT; REYNOLDS NUMBER; VISCOSITY;

DAMPING;

EID: 6344220318     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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