Review of viscous damping in micro-machined structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4176, Issue , 2000, Pages 30-46

  Li, Gary ^a   Hughes, Henry ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; EQUATIONS OF MOTION; MICROACTUATORS; MICROSENSORS; SHEAR FLOW; VISCOSITY;

VISCOUS DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0034546733     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.395618     Document Type: Conference Paper

References (18)