Physically based modeling of squeeze film damping by mixed-level system simulation

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 193-200

  Schrag, Gabriele ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Compact modeling; Mixed level simulation; Squeeze film damping effects

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; NAVIER STOKES EQUATIONS; REYNOLDS NUMBER; THREE DIMENSIONAL; TRIBOLOGY;

MIXED-LEVEL SYSTEM SIMULATION; SQUEEZE FILM DAMPING;

DAMPING;

EID: 17644433135     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00840-8     Document Type: Conference Paper

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