Simulation of gas damping in microstructures with nontrivial geometries

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 172-177

  Mehner, J ^a   Kurth, S ^a   Billep, D ^a   Kaufmann, C ^a   Kehr, K ^a   Doetzel, W ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; FLOW OF FLUIDS; GYROSCOPES; MATHEMATICAL MODELS; MIRRORS; NAVIER STOKES EQUATIONS; PARTIAL DIFFERENTIAL EQUATIONS;

MICROMECHANICAL STRUCTURES; MICROMIRROR ARRAYS;

COMPUTATIONAL FLUID DYNAMICS;

EID: 0031703912     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)