Viscous damping of perforated planar micromechanical structures

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 544-552

  Homentcovschi, Dorel ^a,b   Miles, R N ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

MEMS; Minimum total damping; Optimum number of holes; Perforated structures; Viscous damping

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPRESSIBILITY OF GASES; DAMPING; MATHEMATICAL MODELS; NAVIER STOKES EQUATIONS; PLATES (STRUCTURAL COMPONENTS); VISCOUS FLOW;

MINIMUM TOTAL DAMPING; OPTIMUM NUMBER OF HOLES; PERFORATED STRUCTURES; VISCOUS DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 17044375926     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.032     Document Type: Article

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