Innovations in molding technologies for microfabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 53-60

  Benzler, T ^a   Piotter, V ^a   Hanemann, T ^a   Mueller, K ^a   Norajitra, P ^a   Ruprecht, R ^a   Hausselt, J ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; COMPUTER SIMULATION; LASER ABLATION; METALS; MICROOPTICS; OPTIMIZATION; PHOTOCHEMICAL REACTIONS; POLYMETHYL METHACRYLATES; POWDER METALLURGY;

CERAMIC MICROPARTS; LIGA; MICRO INJECTION MOLDING; MICROFLUIDICS; MICROMOLDING; PHOTOMOLDING;

INJECTION MOLDING;

EID: 0033337627     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)