Dynamic determination of Young's modulus of electroplated nickel used in LIGA technique

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 148-151

  Majjad, H ^a,b   Basrour, S ^a   Delobelle, P ^b   Schmidt, M ^c  

^a Lab Phys Metrologie Oscillateurs   (France)

^b FEMTO ST INSTITUTE   (France)

^c INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CANTILEVER BEAMS; COMPUTER AIDED DESIGN; ELASTIC MODULI; ELECTRODEPOSITION; FINITE ELEMENT METHOD; MICROACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

ELECTROPLATED NICKEL; MICROCANTILEVERS; OPTICAL BENCH; STEADY STATE BENDING TESTS; THREE DIMENSIONAL MICROMACHINING TECHNIQUES;

NICKEL;

EID: 0032653898     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00306-9     Document Type: Article

References (6)

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3. Petersen K.E., Guarnieri C.R. Young's modulus measurements of thin film using micromechanics. J. Appl. Phys. 50(11):1979;6761-6766.
4. ASM Handbook, 10th edn., Vol. 2, 1992, pp. 431-435.
5. A. Girard, J.F. Imbert, Paramètres modaux effectifs et effets de troncature en dynamique des structures, Spacecraft Structures, CNES, Toulouse, France, Dec. 3-6, 1985.
6. Ballandras S., Basrour S., Robert L., Megtert S., Blind P., Rouillay M., Bernede P., Daniau W. Microgrippers fabricated by LIGA technique. Sensors and Actuators A. 58:1997;265-272.