메뉴 건너뛰기




Volumn 178, Issue 1-2, 1997, Pages 56-73

Epitaxial growth of III-V nitride semiconductors by metalorganic chemical vapor deposition

Author keywords

MOCVD; Optoelectronics; Semiconductor laser; Wide bandgap

Indexed keywords

FILM GROWTH; HETEROJUNCTIONS; HYDRIDES; INJECTION LASERS; LIGHT EMITTING DIODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; THIN FILMS; VAPOR PHASE EPITAXY; ENERGY GAP; OPTOELECTRONIC DEVICES; SEMICONDUCTOR GROWTH;

EID: 0031150305     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00079-1     Document Type: Article
Times cited : (64)

References (101)
  • 1
    • 30244487458 scopus 로고
    • Some of the properties of III-N semiconductors are described
    • IEE INSPEC, London
    • Some of the properties of III-N semiconductors are described in: Properties of the Group III Nitrides, Ed. J.H. Edgar (IEE INSPEC, London, 1994).
    • (1994) Properties of the Group III Nitrides
    • Edgar, J.H.1
  • 2
    • 84982066014 scopus 로고
    • F. Fichter, Z. Anorg. Chem. 54 (1907) 322; See also the discussion of the beginnings of III-V semiconductor growth in the preface of: Compound Semiconductors, Eds. R.K. Willardson and H.L. Goering, Vol. 1 (Reinhold, New York, 1962).
    • (1907) Z. Anorg. Chem. , vol.54 , pp. 322
    • Fichter, F.1
  • 3
    • 84982066014 scopus 로고
    • Reinhold, New York
    • F. Fichter, Z. Anorg. Chem. 54 (1907) 322; See also the discussion of the beginnings of III-V semiconductor growth in the preface of: Compound Semiconductors, Eds. R.K. Willardson and H.L. Goering, Vol. 1 (Reinhold, New York, 1962).
    • (1962) Compound Semiconductors , vol.1
    • Willardson, R.K.1    Goering, H.L.2
  • 6
    • 30244446423 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Materials Research Society, Pittsburgh, PA
    • An excellent recent overview of the field is provided by the papers, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996).
    • (1996) MRS Symp. Proc. , vol.395
    • Ponce, F.A.1    Dupuis, R.D.2    Nakamura, S.3    Edmond, J.A.4
  • 8
    • 0029388336 scopus 로고
    • See the review article by: S.N. Mohammed, A.A. Salvador and H. Morkoc, Proc. IEEE 83 (1995) 1306; and also: H. Morkoc, S. Strite, G.B. Gao, M.E. Lin, B. Sverdlov and M. Burns, J. Appl. Phys. 76 (1994) 1363.
    • (1995) Proc. IEEE , vol.83 , pp. 1306
    • Mohammed, S.N.1    Salvador, A.A.2    Morkoc, H.3
  • 21
    • 30244574472 scopus 로고
    • An extensive list of precursor properties and literature references is published Danvers, MA, Morton International, Advanced Materials
    • An extensive list of precursor properties and literature references is published in CVD Metalorganics for Vapor Phase Epitaxy, Product Guide and Literature Review, (Danvers, MA, Morton International, Advanced Materials, 1993).
    • (1993) CVD Metalorganics for Vapor Phase Epitaxy, Product Guide and Literature Review
  • 22
    • 30244511781 scopus 로고    scopus 로고
    • Metalorganic Chemical Vapour Deposition (MOCVD)
    • Institute of Physics, London, ch. B1.1
    • R. D. Dupuis, Metalorganic Chemical Vapour Deposition (MOCVD), in: Handbook of Thin Film Process Technology (Institute of Physics, London, 1996) ch. B1.1, p. 3.
    • (1996) Handbook of Thin Film Process Technology , pp. 3
    • Dupuis, R.D.1
  • 26
    • 0029771076 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh
    • S.A. Safvi, J. Redwing, M. Tischler and T.F. Kuech, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, 1996) p. 255.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 255
    • Safvi, S.A.1    Redwing, J.2    Tischler, M.3    Kuech, T.F.4
  • 30
    • 30244574472 scopus 로고
    • See the extensive list of precursor properties and literature references Morton International, Advanced Materials, Danvers, MA, 1993
    • See the extensive list of precursor properties and literature references in CVD Metalorganics for Vapor Phase Epitaxy, Product Guide and Literature Review, 1993 (Morton International, Advanced Materials, Danvers, MA, 1993).
    • (1993) CVD Metalorganics for Vapor Phase Epitaxy, Product Guide and Literature Review
  • 32
    • 0029746799 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond, Materials Research Society, Pittsburgh, PA
    • A. Thon and T.F. Kuech, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond, (Materials Research Society, Pittsburgh, PA, 1996) p. 97.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 97
    • Thon, A.1    Kuech, T.F.2
  • 44
    • 0029726099 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh, PA
    • H.S. Kong, M. Leonard, G. Bulman and J. Edmond, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996) p. 903.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 903
    • Kong, H.S.1    Leonard, M.2    Bulman, G.3    Edmond, J.4
  • 62
    • 0029746817 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh, PA
    • R.F. Davis, T.W. Weeks Jr., M.D. Bremser, S. Tanaka, R.S. Kern, Z. Sitar, K.S. Ailey, W.G. Perry and C. Wang, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996) p. 3.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 3
    • Davis, R.F.1    Weeks T.W., Jr.2    Bremser, M.D.3    Tanaka, S.4    Kern, R.S.5    Sitar, Z.6    Ailey, K.S.7    Perry, W.G.8    Wang, C.9
  • 82
    • 0029746091 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh, PA
    • D.A.S. Loeber, J.M. Redwing, N.G Anderson and M.A. Tischler, in: Gallium Nitride and Related Materials, MRS Symp. Proc. Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996) p. 949.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 949
    • Loeber, D.A.S.1    Redwing, J.M.2    Anderson, N.G.3    Tischler, M.A.4
  • 86
    • 0029726681 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh, PA
    • H. Amano, S. Sota, M. Hishikawa, M. Yoshida, M. Kawagushi, M. Ohta, H. Sakai and I. Akaskai, in: Gallium Nitride and Related Materials, MRS Symp. Proc. , Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996) p. 869.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 869
    • Amano, H.1    Sota, S.2    Hishikawa, M.3    Yoshida, M.4    Kawagushi, M.5    Ohta, M.6    Sakai, H.7    Akaskai, I.8
  • 89
    • 0029751022 scopus 로고    scopus 로고
    • Gallium Nitride and Related Materials, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond Materials Research Society, Pittsburgh, PA
    • M. Koike, N. Shibata, S. Yamasaki, S. Nagai, S. Asami, A. Kato, N. Koide, H. Amano and I. Akasaki, in: Gallium Nitride and Related Materials, MRS Symp. Proc., Vol. 395, Eds. F.A. Ponce, R.D. Dupuis, S. Nakamura and J.A. Edmond (Materials Research Society, Pittsburgh, PA, 1996) p. 889.
    • (1996) MRS Symp. Proc. , vol.395 , pp. 889
    • Koike, M.1    Shibata, N.2    Yamasaki, S.3    Nagai, S.4    Asami, S.5    Kato, A.6    Koide, N.7    Amano, H.8    Akasaki, I.9


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.