Selective growth of gallium nitride layers with a rectangular cross-sectional shape and stimulated emission from the optical waveguides observed by photopumping

Applied Physics Letters

Volumn 68, Issue 7, 1996, Pages 976-978

  Tanaka, Toshiaki ^a   Uchida, Kenji ^a   Watanabe, Akiyoshi ^a   Minagawa, Shigekazu ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; EMISSION SPECTROSCOPY; METALLORGANIC VAPOR PHASE EPITAXY; NUCLEATION; OPTICAL PUMPING; OPTICAL WAVEGUIDES; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR GROWTH; SURFACES; THERMAL EFFECTS;

GALLIUM NITRIDE; GROWTH TEMPERATURE; LINE NARROWING; NITRIDATION; RECTANGULAR CROSS SECTIONAL SHAPE; SELECTIVE AREA GROWTH TECHNIQUE; STIMULATED EMISSION;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0030082981     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116117     Document Type: Article

References (12)

1. S. Strite and H. Morkoç, J. Vac. Sci. Technol. B AIP 10, 1237 (1992).
2. S. Strite, M. E. Lin, and H. Morkoç, Thin Solid Films INS 231, 197 (1993).
3. R. Dingle, K. L. Shaklee, R. L. Leheny, and R. B. Zetterstrom, Appl. Phys. Lett. AIP 19, 5 (1971).
4. I. M. Catalano, A. Cingplani, M. Ferrara, M. Lugara, and A. Minafra, Solid State Commun. INS 25, 349 (1978).
5. H. Amano, T. Asahi, and I. Akasaki, Jpn. J. Appl. Phys. INS 29, L205 (1990).
6. M. A. Khan, D. T. Olson, J. M. Van Hove, and J. N. Kuznia, Appl. Phys. Lett. AIP 58, 1515 (1991).
7. K. Yung, J. Yee, J. Koo, M. Rubin, N. Newman, and J. Ross, Appl. Phys. Lett. AIP 64, 1135 (1994).
8. X. H. Yang, T. J. Schmidt, W. Shan, J. J. Song, and B. Goldenberg, Appl. Phys. Lett. AIP 66, 1 (1995).
9. H. Amano, M. Kito, K. Hiramatsu, and I. Akasaki, Jpn. J. Appl. Phys. INS 28, L2112 (1989).
10. S. Nakamura, T. Mukai, and M. Senoh, Appl. Phys. Lett. AIP 64, 1687 (1994).
11. S. D. Lester, F. A. Ponce, M. G. Craford, and D. A. Steigerwald, Appl. Phys. Lett. AIP 66, 1249 (1994).
12. Y. Kato, S. Kitamura, K. Hiramatsu, and N. Sawaki, J. Cryst. Growth INS 144, 133 (1994).