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Volumn 7, Issue , 2009, Pages 11-50

X-Ray Masks for LIGA Microfabrication

Author keywords

LIGA; Mask absorber materials; Mask architecture; Mask fabrication; Mask substrates; X ray masks

Indexed keywords

MASKS; SUBSTRATES;

EID: 85018219450     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527622573.ch2     Document Type: Chapter
Times cited : (13)

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